TY  - CONF
AU  - Yong Kim
AU  - Nicholas Dagalakis
AU  - Satyandra Gupta
C2  - 2012 Performance Metrics for Intelligent Systems Workshop, College Park, MD, US
DA  - 2012-05-03 00:05:00
LA  - en
PB  - 2012 Performance Metrics for Intelligent Systems Workshop, College Park, MD, US
PY  - 2012
TI  - Design, fabrication and characterization of a single-layer out-of-plane electrothermal actuator for SOI-MEMS Applications
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910830
ER  -