TY  - CONF
AU  - Martin Foldyna
AU  - Thomas Germer
AU  - Brent Bergner
C2  - Frontiers of Characterization and Metrology for Nanoelectronics 2011, Grenoble, FR
DA  - 2011-05-26 00:05:00
LA  - en
M1  - 1395
PB  - Frontiers of Characterization and Metrology for Nanoelectronics 2011, Grenoble, FR
PY  - 2011
TI  - Effects of Roughness on Scatterometry Signatures
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908805
ER  -