TY  - CONF
AU  - Shuhui Kang
AU  - Wen-Li Wu
AU  - B Vogt
AU  - Vivek Prabhu
AU  - Eric Lin
AU  - Karen Turnquest
C2  - Proceedings of SPIE, San Jose, CA, US
DA  - 2007-02-25 00:02:00
LA  - en
M1  - 6519
PB  - Proceedings of SPIE, San Jose, CA, US
PY  - 2007
TI  - Evaluation of the 3D Compositional Fluctuation Effect on Line-Edge-Roughness
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852724
ER  -