TY  - CONF
AU  - Mark Sobolewski
AU  - James Olthoff
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE) Symp. on Microelectronic Processes, Sensors, and Controls, Monterey, CA
DA  - 1994-05-01 00:05:00
LA  - en
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE) Symp. on Microelectronic Processes, Sensors, and Controls, Monterey, CA
PY  - 1994
TI  - Electrical Sensors for Monitoring rf Plasma Sheaths
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=432
ER  -