TY  - GEN
AU  - Loucas Christophorou
AU  - James Olthoff
C2  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1998-08-01 00:08:00
DO  - https://doi.org/10.6028/NIST.SP.926
LA  - en
PB  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1998
TI  - Electron Interactions with Plasma Processing Gases
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=16721
ER  -