TY  - SER
AU  - Loucas Christophorou
AU  - James Olthoff
C2  - , 
DA  - 2000-10-01 00:10:00
LA  - en
M1  - 88
PB  - , 
PY  - 2000
TI  - Electron Collision Data for Plasma-Processing Gases
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=7872
ER  -