TY  - CONF
AU  - Ann Chiaramonti
AU  - Sten Vollebregt
AU  - R. Ishihara
AU  - Johan van
AU  - Kees Beenakker
C2  - 2012 International Conference on Solid State Devices and Materials, Kyoto, -1
DA  - 2013-03-21
LA  - en
PB  - 2012 International Conference on Solid State Devices and Materials, Kyoto, -1
PY  - 2013
TI  - Integrating carbon nanotubes as vias in a monolithic 3DIC process
ER  -