TY  - CONF
AU  - Lowell Howard
AU  - Joseph Fu
C2  - Proceedings of SPIE, Microlithography and Metrology in Micromachining III, Craig R. Friedrich, Akira Umeda, Editors, Austin, TX, USA
DA  - 1997-09-01 00:09:00
LA  - en
M1  - 3225
PB  - Proceedings of SPIE, Microlithography and Metrology in Micromachining III, Craig R. Friedrich, Akira Umeda, Editors, Austin, TX, USA
PY  - 1997
TI  - Accurate Force Measurements for Miniature Mechanical Systems: A Review of Progress
ER  -