TY  - SER
AU  - Michael Postek
AU  - Andras Vladar
C2  - CRC Press, 
DA  - 2001-06-29 00:06:00
LA  - en
PB  - CRC Press, 
PY  - 2001
TI  - Critical Dimension Metrology in the Scanning Electron Microscope
ER  -