TY  - CONF
AU  - John Villarrubia
AU  - B Bunday
C2  - Proceedings of SPIE, San Jose, CA, USA
DA  - 2005-05-01 00:05:00
LA  - en
M1  - 5752
PB  - Proceedings of SPIE, San Jose, CA, USA
PY  - 2005
TI  - Unbiased Estimation of Linewidth Roughness
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822373
ER  -