TY  - JOUR
AU  - John Villarrubia
AU  - Andras Vladar
AU  - Michael Postek
C2  - Surface and Interface Analysis
DA  - 2005-11-01 00:11:00
LA  - en
M1  - 37(11)
PB  - Surface and Interface Analysis
PY  - 2005
TI  - Scanning electron microscope dimensional metrology using a model-based library
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822537
ER  -