TY  - SER
AU  - Robert Larrabee
AU  - Michael Postek
C2  - SPIE-International Society for Optical Engineering, Bellingham, WA
DA  - 1994-12-01 00:12:00
LA  - en
M1  - CR52
PB  - SPIE-International Society for Optical Engineering, Bellingham, WA
PY  - 1994
TI  - Parameters Characterizing a Critical Dimension Measurement
ER  -