TY  - CONF
AU  - Michael Postek
AU  - Andras Vladar
AU  - G Banke
AU  - T Reilly
C2  - Proceedings MAS, Breckinridge, CO, USA
DA  - 1995-01-01 00:01:00
LA  - en
PB  - Proceedings MAS, Breckinridge, CO, USA
PY  - 1995
TI  - Workshop Report 1: Scanning Electron Microscope Metrology as Related to a Defined Edge Structure
ER  -