TY  - CONF
AU  - L Linholm
AU  - Robert Allen
AU  - Michael Cresswell
AU  - Rathindra Ghoshtagore
AU  - S Mayo
AU  - H Schafft
AU  - John Kramar
C2  - Proceedings of IEEE International Conference on Microelectronic Test Structures, Nara, 1, JA
DA  - 1995-01-01 00:01:00
LA  - en
PB  - Proceedings of IEEE International Conference on Microelectronic Test Structures, Nara, 1, JA
PY  - 1995
TI  - Measurement of Patterned Film Linewidth for Interconnect Characterization
ER  -