TY  - JOUR
AU  - Allen, Richard
AU  - Cresswell, Michael
AU  - Buck, Laurence
C2  - IEEE Electron Device Letters
DA  - 1992-06-01 00:06:00
LA  - en
M1  - 13
PB  - IEEE Electron Device Letters
PY  - 1992
TI  - A New Test Structure for the Electrical Measurement of the Width of Short Features with Arbitrarily Wide Voltage Taps
ER  -