TY  - CONF
AU  - Loren Linholm
AU  - Richard Allen
AU  - Michael Cresswell
AU  - Rathindra Ghoshtagore
AU  - Santos Mayo
AU  - Harry Schafft
AU  - John Kramar
AU  - E Teague
C2  - Proc., IEEE International Conference on Microelectronic Test Structures, Nara, 1, JA
DA  - 1995-12-31 00:12:00
LA  - en
M1  - 8
PB  - Proc., IEEE International Conference on Microelectronic Test Structures, Nara, 1, JA
PY  - 1995
TI  - Measurement of Patterned Film Linewidth for Interconnect Characterization
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=16737
ER  -