TY  - JOUR
AU  - S. Radovanov
AU  - James Olthoff
AU  - Richard Van Brunt
AU  - S. Djurovic
C2  - Journal of Applied Physics
DA  - 1995-07-01 00:07:00
LA  - en
PB  - Journal of Applied Physics
PY  - 1995
TI  - Ion Kinetic-Energy Distributions and Balmer-alpha (H?) Excitation in Ar-H2-Radio-Frequency Discharges
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=7046
ER  -