TY  - GEN
AU  - Stephen Knight
AU  - Joaquin Martinez
AU  - Michele Buckley
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2003-01-01 00:01:00
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2003
TI  - Office of Microelectronics Programs 2003 Programs, Activities, and Accomplishments
ER  -