TY - JOUR
AU - Yicheng Wang
AU - Martin Misakian
AU - Amanda Goyettes
AU - James Olthoff
C2 - Journal of Applied Physics
DA - 2000-11-01 00:11:00
LA - en
PB - Journal of Applied Physics
PY - 2000
TI - Ion Fluxes and Energies in Inductively Coupled Radio-Frequency Discharges Containing C2F6 and c-C4F8
UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=773
ER -