TY  - JOUR
AU  - Cassard, Janet
AU  - Herman, David
AU  - Vernier, Paul
AU  - DeVoe, Don
AU  - Gaitan, Michael
C2  - IEEE Electron Device Letters
DA  - 2007-11-01 00:11:00
LA  - en
M1  - 28
PB  - IEEE Electron Device Letters
PY  - 2007
TI  - Young's Modulus Measurements in Standard IC CMOS Processes using MEMS Test Structures
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32659
ER  -