TY  - JOUR
AU  - J Schneir
AU  - T Mcwaid
AU  - J Alexander
AU  - B Wilfley
C2  - Journal of Vacuum Science and Technology B
DA  - 1994-08-19 00:08:00
LA  - en
M1  - 12(6)
PB  - Journal of Vacuum Science and Technology B
PY  - 1994
TI  - Design of an Atomic Force Microscope with Interferometric Position Control
ER  -