TY  - JOUR
AU  - M Calleja
AU  - J Anguita
AU  - R Garcia
AU  - K Birkelund
AU  - F Perez-murano
AU  - John Dagata
C2  - Nanotechnology
DA  - 1999-03-01 00:03:00
LA  - en
M1  - 10(1)
PB  - Nanotechnology
PY  - 1999
TI  - Nanometre-scale Oxidation of Silicon Surfaces by Dynamic Force Microscopy: Reproducibility, Kinetics and Nanofabrication
ER  -