TY  - CONF
AU  - Robert Larrabee
AU  - Richard Silver
AU  - M Davidson
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA, USA
DA  - 1999-06-01 00:06:00
LA  - en
M1  - 3677
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA, USA
PY  - 1999
TI  - Optical Linewidth Models: Then and Now
ER  -