TY  - JOUR
AU  - O Glembocki
AU  - J Tuchman
AU  - John Dagata
AU  - K Ko
AU  - S Pang
AU  - C Stutz
C2  - Applied Physics Letters
DA  - 1998-01-01 00:01:00
LA  - en
M1  - 73(1)
PB  - Applied Physics Letters
PY  - 1998
TI  - Electronic Properties of GaAs Surfaces Etched in an Electron Cyclotron Resonance Source and Chemically Passivated Using P2S5
ER  -