TY  - JOUR
AU  - Ann Chiaramonti
AU  - Sten Vollebregt
AU  - Johan van
AU  - Kees Beenakker
AU  - R. Ishihara
C2  - Japanese Journal of Applied Physics Part 1-Regular Papers Brief Communications & Review Papers
DA  - 2013-03-21
LA  - en
PB  - Japanese Journal of Applied Physics Part 1-Regular Papers Brief Communications & Review Papers
PY  - 2013
TI  - Towards the Integration of Carbon Nanotubes as Vias in Monolithic 3D Integrated Circuits
ER  -