TY  - CONF
AU  - Donald Windover
AU  - David Gil
AU  - Albert Henins
AU  - James Cline
C2  - 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics , Albany, NY
DA  - 2009-10-30
DO  - https://doi.org/10.1063/1.3251259
LA  - en
M1  - 1173
PB  - 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics , Albany, NY
PY  - 2009
TI  - NIST High Resolution X-Ray Diffraction Standard Reference Material: SRM 2000
ER  -