TY  - JOUR
AU  - Gheorghe Stan
AU  - Sean King
AU  - Robert Cook
C2  - Journal of Materials Research
DA  - 2009-09-14
LA  - en
M1  - 24
PB  - Journal of Materials Research
PY  - 2009
TI  - Elastic modulus of low-k dielectric thin films measured by load-dependent contact-resonance atomic force microscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902329
ER  -