TY  - JOUR
AU  - Heather Patrick
AU  - Ravikiran Attota
AU  - Bryan Barnes
AU  - Thomas Germer
AU  - Michael Stocker
AU  - Richard Silver
AU  - Michael Bishop
C2  - Journal of Microlithography Microfabrication and Microsystems
DA  - 2008-01-02
LA  - en
M1  - 7
PB  - Journal of Microlithography Microfabrication and Microsystems
PY  - 2008
TI  - Optical Critical Dimension Measurement of Silicon Grating Targets Using Back Focal Plane Scatterfield Microscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=841060
ER  -