TY  - CONF
AU  - E Landree
AU  - Terrence Jach
AU  - D Brady
AU  - A. Karamcheti
AU  - J Canterbury
AU  - W Chism
AU  - A Diebold
C2  - Characterization and Metrology for ULSI Technology Conference, -1
DA  - 2001-01-01
LA  - en
PB  - Characterization and Metrology for ULSI Technology Conference, -1
PY  - 2001
TI  - Characterization of Silicon-Oxynitride Dielectric Thin Films Using Grazing Incidence X-ray Photoelectron Spectroscopy
ER  -