TY  - CONF
AU  - Ronald Dixson
AU  - Ndubuisi Orji
AU  - B Bunday
AU  - J Allgair
C2  - Instrumentation, Metrology, and Standards for Nanomanufacturing II
Proceedings of SPIE Volume 7042  
, San Diego, CA
DA  - 2008-09-09
LA  - en
M1  - 7042
PB  - Instrumentation, Metrology, and Standards for Nanomanufacturing II
Proceedings of SPIE Volume 7042  
, San Diego, CA
PY  - 2008
TI  - Accuracy Considerations for Critical Dimension Semiconductor Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824699
ER  -