TY  - JOUR
AU  - A Bard
AU  - K Berggren
AU  - J Wilbur
AU  - John Gillaspy
AU  - S Rolston
AU  - Jabez McClelland
AU  - William Phillips
AU  - M Prentiss
AU  - G Whitesides
C2  - Journal of Vacuum Science and Technology B
DA  - 1997-09-01
LA  - en
M1  - 15
PB  - Journal of Vacuum Science and Technology B
PY  - 1997
TI  - Self-Assembled Monolayers Exposed by Metastable Argon and Metastable Helium for Neutral Atom Lithography and Atomic Beam Imaging
ER  -