TY  - GEN
AU  - Hao Zhang
AU  - Daniel Ott
AU  - Jun-Feng Song
AU  - D Ott
AU  - Wei Chu
C2  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2015-07-14 00:07:00
DO  - https://doi.org/10.6028/jres.120.010
LA  - en
PB  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2015
TI  - A simple and fast spline filtering algorithm for surface metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918312
ER  -