TY - GEN AU - Hao Zhang AU - D Ott AU - Wei Chu C2 - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD DA - 2015-04-01 DO - https://doi.org/10.6028/jres.120.006 LA - en PB - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD PY - 2015 TI - An Areal Isotropic Spline Filter for Surface Metrology ER -