TY  - JOUR
AU  - Ronald Dixson
AU  - Boon
AU  - Xavier Bonnaud
AU  - Ndubuisi Orji
C2  - Journal of Vacuum Science and Technology B
DA  - 2015-04-30
DO  - https://doi.org/10.1116/1.4919090
LA  - en
M1  - 33
PB  - Journal of Vacuum Science and Technology B
PY  - 2015
TI  - Interactions of Higher Order Tip Effects in CD-AFM Linewidth Metrology
ER  -