TY  - CONF
AU  - Ronald Dixson
AU  - Donald Chernoff
AU  - Shihua Wang
AU  - Theodore Vorburger
AU  - Ndubuisi Orji
AU  - Siew-Leng Tan
AU  - Joseph Fu
C2  - 2010 SCANNING/SPIE Proceedings, Monterey, CA
DA  - 2010-06-14
LA  - en
PB  - 2010 SCANNING/SPIE Proceedings, Monterey, CA
PY  - 2010
TI  - Interlaboratory Comparison of Traceable Atomic Force Microscope Pitch Measurements
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905745
ER  -