TY  - CONF
AU  - Theodore Vorburger
AU  - Albert Hilton
AU  - Ronald Dixson
AU  - Ndubuisi Orji
AU  - J. Powell
AU  - A. Trunek
AU  - P. Neudeck
AU  - P. Abel
C2  - 7638: Metrology, Inspection, and Process Control for Microlithography XXIV,
Conference 7638, San Jose, CA
DA  - 2010-03-31
LA  - en
M1  - 7638
PB  - 7638: Metrology, Inspection, and Process Control for Microlithography XXIV,
Conference 7638, San Jose, CA
PY  - 2010
TI  - Calibration of 1 nm SiC Step Height Standards
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905193
ER  -