TY  - CONF
AU  - Ravikiran Attota
AU  - Richard Silver
AU  - M Bishop
AU  - Ronald Dixson
C2  - Proceedings of SPIE, San Diego, CA
DA  - 2006-03-24
LA  - en
M1  - 6152
PB  - Proceedings of SPIE, San Diego, CA
PY  - 2006
TI  - Optical Critical Dimension Measurement and Illumination Analysis using the Through-focus Focus Metric
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823215
ER  -