TY  - JOUR
AU  - James Liddle
AU  - Gregg Gallatin
C2  - Nanoscale
DA  - 2011-04-12
LA  - en
PB  - Nanoscale
PY  - 2011
TI  - Lithography, Metrology and Nanomanufacturing
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=907745
ER  -