TY  - CONF
AU  - Jing Qin
AU  - Hui Zhou
AU  - Bryan Barnes
AU  - Francois Goasmat
AU  - Ronald Dixson
AU  - Richard Silver
C2  - Instrumentation, Metrology, and Standards for Nanomanufacturing IV, Proceedings of SPIE Volume: 7767, San Diego, CA
DA  - 2012-10-11
DO  - https://doi.org/10.1117/12.946120
LA  - en
M1  - 8466
PB  - Instrumentation, Metrology, and Standards for Nanomanufacturing IV, Proceedings of SPIE Volume: 7767, San Diego, CA
PY  - 2012
TI  - Multiple-order Imaging for Optical Critical Dimension Metrology using Microscope Characterization
ER  -