TY  - JOUR
AU  - Michael Gaither
AU  - Richard Gates
AU  - Rebecca Kirkpatrick
AU  - Robert Cook
AU  - Frank DelRio
C2  - Journal of Microelectromechanical Systems
DA  - 2013-05-30
LA  - en
PB  - Journal of Microelectromechanical Systems
PY  - 2013
TI  - Etching process effects on surface structure, fracture strength, and reliability of single-crystal silicon theta-like specimens
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=912389
ER  -