TY - CONF AU - Chukwudi Okoro AU - Yaw Obeng AU - Jan Obrzut AU - Pavel Kabos AU - Klaus Hummler C2 - Proceeding of IEEE Electronic Components and Technology Conference (ECTC), Las Vegas, NV DA - 2013-05-28 LA - en PB - Proceeding of IEEE Electronic Components and Technology Conference (ECTC), Las Vegas, NV PY - 2013 TI - Use of RF-Based Technique as a Metrology Tool for TSV Reliability Analysis ER -