TY  - JOUR
AU  - Ravikiran Attota
AU  - Benjamin Bunday
AU  - Victor Vertanian
C2  - Applied Physics Letters
DA  - 2013-06-07
LA  - en
PB  - Applied Physics Letters
PY  - 2013
TI  - Critical dimension metrology by through-focus scanning optical microscopy beyond the 22 nm node
ER  -