TY  - JOUR
AU  - Attota, Ravikiran
AU  - Kang, Hyeonggon
AU  - Scott, Keana
AU  - Allen, Richard
AU  - Vladar, Andras
AU  - Benjamin, Bunday
C2  - Measurement Science and Technology
DA  - 2018-09-27
DO  - https://doi.org/10.1088/1361-6501/aae4c2
LA  - en
M1  - 29
PB  - Measurement Science and Technology
PY  - 2018
TI  - Nondestructive shape process monitoring of three-dimensional high aspect ratio targets using through-focus scanning optical microscopy Optical Microscopy
ER  -