TY  - CONF
AU  - Darwin Reyes-Hernandez
AU  - Michael Halter
AU  - Jeeseong Hwang
C2  - Proceedings of NanoTech Conference 2013, National Harbor, MD
DA  - 2013-05-12
LA  - en
PB  - Proceedings of NanoTech Conference 2013, National Harbor, MD
PY  - 2013
TI  - Metrology for Lab-on-a-Chip Final-Product Devices
ER  -