TY  - JOUR
AU  - Christine Mahoney
AU  - James Kushmerick
AU  - Kristen
C2  - Journal of Physical Chemistry C
DA  - 2010-09-02
LA  - en
M1  - 114
PB  - Journal of Physical Chemistry C
PY  - 2010
TI  - Investigation of damage mechanisms in PMMA during ToF-SIMS depth profiling with 5 keV and 8 keV SF5+ primary ions.
ER  -