TY  - JOUR
AU  - Grossman, Erich
AU  - Gould, Martin
AU  - Mujica-Schwahn, Natalie
C2  - Surface Topography: Metrology and Properties
DA  - 2016-09-19
LA  - en
M1  - 4
PB  - Surface Topography: Metrology and Properties
PY  - 2016
TI  - Robust evaluation of statistical surface topography parameters using focus-variation microscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=919854
ER  -