TY  - CONF
AU  - Bryan Barnes
AU  - Jing Qin
AU  - Hui Zhou
AU  - Richard Silver
C2  - Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII, San Diego, CA
DA  - 2013-09-23
DO  - https://doi.org/10.1117/12.2027259
LA  - en
M1  - 8819
PB  - Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII, San Diego, CA
PY  - 2013
TI  - Quantitative microscope characterization for parametric measurements with sub-nm parametric uncertainties
ER  -