TY  - CONF
AU  - Ravikiran Attota
AU  - Victor Vertanian
AU  - Steve Olson
AU  - Robert Edgeworth
AU  - Iqbal Ali
AU  - Craig Huffman
AU  - Pate Moschak
AU  - Harry Lazier
AU  - Elizabeth Lorenzini
C2  - Frontiers of Characterization and Metrology for Nanoelectronics
, Gaithersburg, MD
DA  - 2013-01-23
LA  - en
PB  - Frontiers of Characterization and Metrology for Nanoelectronics
, Gaithersburg, MD
PY  - 2013
TI  - TSV REVEAL HEIGHT AND BUMP DIMENSION METROLOGY BY THE TSOM METHOD: FROM NANOMETER TO MICROMETER SCALE
ER  -