TY  - CONF
AU  - Jing Qin
AU  - Hui Zhou
AU  - Bryan Barnes
AU  - Ronald Dixson
AU  - Richard Silver
C2  - OSA Technical Digests, Alexandria, VA
DA  - 2013-06-23
DO  - https://doi.org/10.1364/AOPT.2013.JTu4A.32
LA  - en
PB  - OSA Technical Digests, Alexandria, VA
PY  - 2013
TI  - 3-D Optical Metrology of Finite sub-20nm Dense Arrays With sub-nanometer Parametric Uncertainties
ER  -