TY  - CONF
AU  - Ronald Dixson
AU  - R Koning
AU  - V Tsai
AU  - Joseph Fu
AU  - Theodore Vorburger
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA
DA  - 1999-06-01
LA  - en
M1  - 3677
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA
PY  - 1999
TI  - Dimensional Metrology with the NIST Calibrated Atomic Force Microscope
ER  -